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Cluster Ion-Solid Interactions : Theory, Simulation, and Experiment (Hardcover) (Zinetula Insepov)
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An important tool for nanoscale material processing, gas cluster ion beam (GCIB) technology uses charged cluster ions for modifying surfaces. Co-authored by the inventor of this technology, this book gives a balanced treatment of the theory, simulation methods, experimental techniques, and emerging applications. The authors discuss the impact of GCIB technology on the semiconductor industry, including its use in shallow junction formation, etching and smoothing of semiconductors, assisted formation of thin films with nanoscale accuracy, and other surface modification applications.