:

product description page

Micro and Nano Fabrication : Tools and Processes (Reprint) (Paperback) (Hans H. Gatzen)

Micro and Nano Fabrication : Tools and Processes (Reprint) (Paperback) (Hans H. Gatzen) - image 1 of 1

About this item

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Edition: Reprint
Genre: Technology
Format: Paperback
Publisher: Springer Verlag
Author: Hans H. Gatzen
Language: English
Street Date: October 21, 2016
TCIN: 51896068
UPC: 9783662508268
Item Number (DPCI): 248-36-9966
If the item details above aren’t accurate or complete, we want to know about it. Report incorrect product info.

Guest reviews

Prices, promotions, styles and availability may vary by store & online. See our price match guarantee. See how a store is chosen for you.