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Micro and Nano Fabrication : Tools and Processes (Reprint) (Paperback) (Hans H. Gatzen)

Micro and Nano Fabrication : Tools and Processes (Reprint) (Paperback) (Hans H. Gatzen) - image 1 of 1

About this item

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Edition: Reprint
Genre: Technology
Format: Paperback
Publisher: Springer Verlag
Author: Hans H. Gatzen
Language: English
Street Date: October 21, 2016
TCIN: 51896068
UPC: 9783662508268
Item Number (DPCI): 248-36-9966
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