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A User's Guide to Ellipsometry - (Dover Civil and Mechanical Engineering) by Harland G Tompkins (Paperback)
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About this item
Highlights
- This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films.
- About the Author: Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.
- 288 Pages
- Science, Nanoscience
- Series Name: Dover Civil and Mechanical Engineering
Description
About the Book
Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.Book Synopsis
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
About the Author
Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.Dimensions (Overall): 8.5 Inches (H) x 5.64 Inches (W) x .56 Inches (D)
Weight: .66 Pounds
Suggested Age: 22 Years and Up
Number of Pages: 288
Genre: Science
Sub-Genre: Nanoscience
Series Title: Dover Civil and Mechanical Engineering
Publisher: Dover Publications
Format: Paperback
Author: Harland G Tompkins
Language: English
Street Date: July 7, 2006
TCIN: 85173591
UPC: 9780486450285
Item Number (DPCI): 247-61-6392
Origin: Made in the USA or Imported
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Shipping details
Estimated ship dimensions: 0.56 inches length x 5.64 inches width x 8.5 inches height
Estimated ship weight: 0.66 pounds
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