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About this item
Highlights
- Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge.
- About the Author: Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.
- 432 Pages
- Science, Physics
Description
Book Synopsis
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.About the Author
Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.
Dimensions (Overall): 9.7 Inches (H) x 6.18 Inches (W) x 1.21 Inches (D)
Weight: 1.64 Pounds
Suggested Age: 22 Years and Up
Number of Pages: 432
Genre: Science
Sub-Genre: Physics
Publisher: Wiley-Interscience
Theme: Electromagnetism
Format: Hardcover
Author: Brian Chapman
Language: English
Street Date: September 25, 1980
TCIN: 89984093
UPC: 9780471078289
Item Number (DPCI): 247-09-9909
Origin: Made in the USA or Imported
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Shipping details
Estimated ship dimensions: 1.21 inches length x 6.18 inches width x 9.7 inches height
Estimated ship weight: 1.64 pounds
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