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A User's Guide to Ellipsometry - (Dover Civil and Mechanical Engineering) by Harland G Tompkins (Paperback)

Name: A User's Guide to Ellipsometry - (Dover Civil and Mechanical Engineering) by Harland G Tompkins (Paperback)
Brand: Dover Publications
SKU: 85173591
Price: 9.42 USD
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Details

Highlights

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films.
About the Author: Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.
288 Pages
Science, Nanoscience
Series Name: Dover Civil and Mechanical Engineering

Description

About the Book

Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.

Book Synopsis

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

About the Author

Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.

Specifications

Dimensions (Overall): 8.5 Inches (H) x 5.64 Inches (W) x .56 Inches (D)

Weight: .66 Pounds

Suggested Age: 22 Years and Up

Number of Pages: 288

Genre: Science

Sub-Genre: Nanoscience

Series Title: Dover Civil and Mechanical Engineering

Publisher: Dover Publications

Format: Paperback

Author: Harland G Tompkins

Language: English

Street Date: July 7, 2006

TCIN: 85173591

UPC: 9780486450285

Item Number (DPCI): 247-61-6392

Origin: Made in the USA or Imported

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Shipping details

Estimated ship dimensions: 0.56 inches length x 5.64 inches width x 8.5 inches height

Estimated ship weight: 0.66 pounds

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